| Train | Source | Destination | Days Run from Vellore Cantonment |
| 06167 - Mas Kcvl Special | Vellore Cantonment (VLR) | Villupuram Jn (VM) | Wed |
| # | Station | Arrival | Departure | Halt | Distance | Day |
| 1 | Vellore Cantonment (VLR) | Source | 02:05 AM | 0 Mins | 0 KMs | 1 |
| 2 | Kannamangalam (KMM) | 02:26 AM | 02:27 AM | 1 Mins | 21 KMs | 1 |
| 3 | Onnupuram (OPM) | 02:33 AM | 02:34 AM | 1 Mins | 26 KMs | 1 |
| 4 | Sedarampattu (SDPT) | 02:40 AM | 02:41 AM | 1 Mins | 30 KMs | 1 |
| 5 | Arni Road (ARV) | 02:46 AM | 02:47 AM | 1 Mins | 36 KMs | 1 |
| 6 | Polur (PRL) | 02:59 AM | 03:00 AM | 1 Mins | 52 KMs | 1 |
| 7 | Tiruvannamalai (TNM) | 03:20 AM | 03:25 AM | 5 Mins | 83 KMs | 1 |
| 8 | Tandarai (TNI) | 03:49 AM | 03:50 AM | 1 Mins | 100 KMs | 1 |
| 9 | Andampaliam (AND) | 03:56 AM | 03:57 AM | 1 Mins | 103 KMs | 1 |
| 10 | Adhichchanur (ACN) | 04:03 AM | 04:04 AM | 1 Mins | 108 KMs | 1 |
| 11 | Tirukkovilur (TRK) | 04:13 AM | 04:14 AM | 1 Mins | 117 KMs | 1 |
| 12 | Ayandur (AYD) | 04:26 AM | 04:27 AM | 1 Mins | 130 KMs | 1 |
| 13 | Mambalappattu (MMP) | 04:33 AM | 04:34 AM | 1 Mins | 134 KMs | 1 |
| 14 | Venkatesapuram (VKM) | 04:44 AM | 04:45 AM | 1 Mins | 143 KMs | 1 |
| 15 | Villupuram Jn (VM) | 05:00 AM | Destination | 0 Mins | 151 KMs | 1 |